HIWIN Equipment Front End Module

EFEM

Feature

EFEM220-D13

Compatible with standard 6 and 8-inch open cassette.
Provides flexible solution with a modular design.
Certified with SEMI S2 standard.
Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
Equipped with sensors to monitor device status.
Support GUI interface for remote control. Integrate subsystems to provide a single command window.

EFEM320-D01

Compatible with standard 8-inch SMIF.
External control box design to maximize the internal space.
Certified with SEMI S2 standard.
Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
Equipped with sensors to monitor device status.
Equipped with barcode, label, and character recognition devices to provide the complete production tracking.

EFEM320-D02

Compatible with standard 8 and 12-inch cassette.
Panel type electric cabinet design.
Certified with SEMI S2 standard.
Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
Equipped with sensors to monitor device status.
Real-time image monitoring, equipped with barcode, label, and character recognition devices to provide the complete production tracking.
Provide customized design for special wafer or panel.

EFEM320-D03

Compatible with standard 8 and 12-inch cassette.
Hidden electric cabinet and aligner design, and the connection dock is maximized.
Certified with SEMI S2 standard.
Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
Equipped with sensors to monitor device status.
Provide customized design for special wafer or panel.
Automatic pressure control system, through the change of ambient pressure, adjust the fan speed to maintain the set value.

EFEM320-D06

Applicable for 12” wafer and metal carrier.
Upper panel electric cabinet design , the best choice for one to two.
Certified with SEMI S2 standard.
Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
Equipped with sensors to monitor device status.
Real-time image monitoring, equipped with barcode, label, and character recognition devices to provide the complete production tracking.
Provide customized design for special wafer or panel.

EFEM340-D08

High speed and Long stroke, applicable for 12 ” cassette.
Equipped with grating and safety standard is upgraded.
Certified with SEMI S2 standard.
Using only RoHS-compliant parts. Can be used in ISO Class 1 environment.
Equipped with sensors to monitor device status.
Support GUI interface for remote control. Integrate subsystems to provide a single command window.